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[IEEE 2011 IEEE 4th International Nanoelectronics Conference (INEC) - Tao-Yuan, Taiwan (2011.06.21-2011.06.24)] The 4th IEEE International NanoElectronics Conference - Nano fabrication analysis of RF NEMS switch
Yang, Yi Xiu, Rahman, Hamood Ur, Ramer, RodicaYear:
2011
Language:
english
DOI:
10.1109/inec.2011.5991701
File:
PDF, 1.54 MB
english, 2011