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[IEEE 1998 IEEE International SOI Conference Proceedings - Stuart, FL, USA (5-8 Oct. 1998)] 1998 IEEE International SOI Conference Proceedings (Cat No.98CH36199) - Gate oxide integrity testing on SOI wafers without test structure fabrication
Henaux, S., Mondon, F., Reimbold, G., Moriceau, H., Barge, T., Auberton-Herve, A.J.Year:
1998
Language:
english
DOI:
10.1109/soi.1998.723124
File:
PDF, 208 KB
english, 1998