Talbot-SNOM method for non-contact evaluation of...

Optics Communications 2005 Vol. 248; Iss. 1-3

Talbot-SNOM method for non-contact evaluation of high-density gratings

Hongxin Luo, Changhe Zhou, Hua Zou, Yunqing Lu
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Volume:
248
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.optcom.2004.12.004
File:
PDF, 246 KB
english, 2005
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