[IEEE 2007 Conference on Lasers and Electro-Optics - Pacific Rim - Seoul, South Korea (2007.08.26-2007.08.31)] 2007 Conference on Lasers and Electro-Optics - Pacific Rim - Design of mask grating for obtaining the effect of an off-axis illumination in optical lithography
Kim, Young-Seok, Song, Seok Ho, Oh, Sung-Hyun, Choi, Yong-Kyu, O, Beom-Hoan, Park, Se-Geun, Lee, El-Hang, Lee, Seung GolYear:
2007
Language:
english
DOI:
10.1109/cleopr.2007.4391349
File:
PDF, 1.34 MB
english, 2007