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[IEEE 2013 36th International Spring Seminar on Electronics Technology (ISSE) - Alba Iulia, Romania (2013.05.8-2013.05.12)] Proceedings of the 36th International Spring Seminar on Electronics Technology - Study of sputtering process of alumina thin films
Mach, Pavel, Kocian, Miroslav, Kolarova, JanaYear:
2013
Language:
english
DOI:
10.1109/isse.2013.6648251
File:
PDF, 253 KB
english, 2013