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[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Arrays of micro Penning-Malmberg traps: AN approach to fabricate very high aspect ratios
Narimannezhad, Alireza, Jennings, Joshah, Weber, Marc H., Lynn, Kelvin G.Year:
2014
Language:
english
DOI:
10.1109/memsys.2014.6765674
File:
PDF, 2.67 MB
english, 2014