[IEEE 2009 Proceedings of ESSCIRC (ESSCIRC) - Athens, Greece (2009.09.14-2009.09.18)] 2009 Proceedings of ESSCIRC - Nanoelectromechanical systems: A new opportunity for microelectronics
Roukes, MichaelYear:
2009
Language:
english
DOI:
10.1109/esscirc.2009.5325923
File:
PDF, 105 KB
english, 2009