[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - New out-of-plane light attenuation scheme based on surface micromachined pop-up mirror and movement translation micromechanism
Chengkuo Lee,, Yu-Shen Lin,, Yen-Jyh Lai,, Ming Hung Tasi,, Chihchung Chen,, Chia-Yu Wu,, Ruey-Shing Huang,Year:
2003
Language:
english
DOI:
10.1109/imnc.2003.1268631
File:
PDF, 242 KB
english, 2003