Sputtering of Si with keV Ar +...

Sputtering of Si with keV Ar + Ions. II. Computer Simulation of Sputter Broadening Due to Ion Bombardment in Depth Profiling

Kang, Suk Tai, Shimizu, Ryuichi, Okutani, Tsuyoshi
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Volume:
18
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.18.1987
Date:
October, 1979
File:
PDF, 956 KB
1979
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