Sputtering of Si with keV Ar + Ions. I. Measurement and Monte Carlo Calculations of Sputtering Yield
Kang, Suk Tai, Shimizu, Ryuichi, Okutani, TsuyoshiVolume:
18
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.18.1717
Date:
September, 1979
File:
PDF, 1.15 MB
1979