Sputtering of Si with keV Ar +...

Sputtering of Si with keV Ar + Ions. I. Measurement and Monte Carlo Calculations of Sputtering Yield

Kang, Suk Tai, Shimizu, Ryuichi, Okutani, Tsuyoshi
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Volume:
18
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.18.1717
Date:
September, 1979
File:
PDF, 1.15 MB
1979
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