High-Performance Metal–Insulator–Metal Capacitors With...

IEEE Electron Device Letters 2010 / 08 Vol. 31; Iss. 8

High-Performance Metal–Insulator–Metal Capacitors With $\hbox{HfTiO}/\hbox{Y}_{2}\hbox{O}_{3}$ Stacked Dielectric

Bing-Yue Tsui,, Hsiao-Hsuan Hsu,, Chun-Hu Cheng,
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Volume:
31
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2010.2051316
Date:
August, 2010
File:
PDF, 321 KB
english, 2010
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