Liquid Operation of Silicon Microcantilever Heaters

IEEE Sensors Journal 2008 / 11 Vol. 8; Iss. 11

Liquid Operation of Silicon Microcantilever Heaters

Lee, Jungchul, King, William P.
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Volume:
8
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2008.2005159
Date:
November, 2008
File:
PDF, 386 KB
english, 2008
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