![](/img/cover-not-exists.png)
Precise control of dry etching for nanometer scale air-hole arrays in two-dimensional GaAs/AlGaAs photonic crystal slabs
Naoki Ikeda, Yoshimasa Sugimoto, Yoshinori Watanabe, Nobuhiko Ozaki, Yoshiaki Takata, Yu Tanaka, Kuon Inoue, Kiyoshi AsakawaVolume:
275
Year:
2007
Language:
english
Pages:
11
DOI:
10.1016/j.optcom.2007.03.036
File:
PDF, 1.66 MB
english, 2007