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[IEEE 1994 IEEE International SOI Conference - Nantucket, MA, USA (3-6 Oct. 1994)] Proceedings. IEEE International SOI Conference - An effective method to screen SOI wafers for mass production
Yue, J., Liu, S.T., Fechner, P., Gardner, G., Witcraft, W., Finn, C.Year:
1994
Language:
english
DOI:
10.1109/soi.1994.514272
File:
PDF, 127 KB
english, 1994