Automatic synthesis of equipment recipes from specified wafer-state transitions
Davis, J.C., Mozumder, P.K., Burch, R., Fernando, C., Apte, P.P., Saxena, S., Rao, S., Vasanth, K.Volume:
11
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/66.728548
Date:
January, 1998
File:
PDF, 203 KB
english, 1998