Research on Laser Trimming of Silicon MEMS Vibratory...

Integrated Ferroelectrics 2011 / 01 Vol. 129; Iss. 1

Research on Laser Trimming of Silicon MEMS Vibratory Gyroscopes

Zhao, Xiaoguang, Zhou, Bin, Zhang, Rong, Chen, Zhiyong
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Volume:
129
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584587.2011.576898
Date:
January, 2011
File:
PDF, 575 KB
english, 2011
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