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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Ultra-wide tuning range silicon MEMS capacitors on glass with tera-ohm isolation and low parasitics
McCormick, D.T., Tien, N.C., MacDonald, N., Matthews, R., Hibbs, A.Volume:
1
Year:
2005
Language:
english
DOI:
10.1109/SENSOR.2005.1496642
File:
PDF, 912 KB
english, 2005