[IEEE 2008 2nd Electronics Systemintegration Technology Conference - Greenwich (2008.09.1-2008.09.4)] 2008 2nd Electronics Systemintegration Technology Conference - Die-level integration of metal MEMS with CMOS
Mukherjee, A.G., Kiziroglou, M.E., Holmes, A.S., Yeatman, E.M.Year:
2008
Language:
english
DOI:
10.1109/estc.2008.4684344
File:
PDF, 9.12 MB
english, 2008