Advanced Quality in Epitaxial Layer Transfer by Bond and...

Japanese Journal of Applied Physics 1996 / 2 Vol. 35; Iss. Part 1, No

Advanced Quality in Epitaxial Layer Transfer by Bond and Etch-back of Porous Si

Sato, Nobuhiko, Sakaguchi, Kiyofumi, Yamagata, Kenji, Fujiyama, Yasutomo, Nakayama, Jun, Yonehara, Takao
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Volume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.973
Date:
February, 1996
File:
PDF, 1.77 MB
1996
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