[IEEE 2002 IEEE/LEOS International Conference on Optical...

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[IEEE 2002 IEEE/LEOS International Conference on Optical MEMS - Lugano, Switzerland (20-23 Aug. 2002)] IEEE/LEOS International Conference on Optical MEMs - Development and characterization of electromagnetic micro shutter in MEMS variable optical attenuator

Xuhan Dai,, Xiaolin Zhao,, Bingchu Cai,
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Year:
2002
Language:
english
DOI:
10.1109/omems.2002.1031444
File:
PDF, 126 KB
english, 2002
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