Analysis of SiO2 Thin Film Deposited by Reactive Sputtering
Radović, I., Serruys, Yves, Limoge, Yves, Jaoul, Olivier, Romčević, N.Ž, Poissonnet, S., Bibić, N.Volume:
518
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.518.149
File:
PDF, 712 KB
english, 2006