[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Air-isolated through-wafer interconnects for microsystem applications
Lemmerhirt, D.F., Wise, K.D.Volume:
2
Year:
2003
Language:
english
DOI:
10.1109/sensor.2003.1216953
File:
PDF, 441 KB
english, 2003