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[IEEE Technical Digest., International Electron Devices Meeting - San Francisco, CA, USA (11-14 Dec. 1988)] Technical Digest., International Electron Devices Meeting - Fully planarized 0.5 mu m technologies for 16-Mb DRAM
Wakamiya, W., Eimori, T., Ozaki, H., Itoh, H., Fujiwara, K., Shibano, T., Miyatake, H., Fujii, A., Tsutsumi, T., Satoh, S., Katoh, T.Year:
1988
DOI:
10.1109/iedm.1988.32802
File:
PDF, 417 KB
1988