Energy effect of the laser-induced vertical metallic link

IEEE Transactions on Semiconductor Manufacturing 2001 / 5 Vol. 14; Iss. 2

Energy effect of the laser-induced vertical metallic link

Wei Zhang,, Joo-Han Lee,, Bernstein, J.B.
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Volume:
14
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/66.920728
Date:
May, 2001
File:
PDF, 138 KB
english, 2001
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