Two-dimensional self-consistent microwave argon plasma...

Journal of Applied Physics 2003 Vol. 94; Iss. 1

Two-dimensional self-consistent microwave argon plasma simulations with experimental verification

Li, Y., Gordon, M. H., Roe, L. A., Hassouni, K., Grotjohn, T.
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Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1577810
File:
PDF, 646 KB
english, 2003
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