Low resistance palladium/molybdenum based ohmic contacts to...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2014 / 07 Vol. 32; Iss. 4

Low resistance palladium/molybdenum based ohmic contacts to n-GaSb grown on GaAs

Rahimi, Nassim, Aragon, Andrew A., Romero, Orlando S., Shima, Darryl M., Rotter, Thomas J., Mukherjee, Sayan D., Balakrishnan, Ganesh, Lester, Luke F.
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4884948
Date:
July, 2014
File:
PDF, 1.44 MB
english, 2014
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