On the realization of microscopic grids for local strain...

Optics and Lasers in Engineering 2007 Vol. 45; Iss. 12

On the realization of microscopic grids for local strain measurement by direct interferometric photolithography

Raphaël Moulart, René Rotinat, Fabrice Pierron, Gilles Lerondel
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Volume:
45
Year:
2007
Language:
english
Pages:
17
DOI:
10.1016/j.optlaseng.2007.06.009
File:
PDF, 4.67 MB
english, 2007
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