Static and dynamic characterization of AlN-driven microcantilevers using optical interference microscopy
Katarzyna Krupa, Michał Józwik, Christophe Gorecki, Alexandru Andrei, Łukasz Nieradko, Patrick Delobelle, Laurent HirsingerVolume:
47
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.optlaseng.2008.05.001
File:
PDF, 764 KB
english, 2009