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Residual stress assessment of interconnects by slot milling with FIB and geometric phase analysis
Qinghua Wang, Huimin Xie, Zhanwei Liu, Xinhao Lou, Jianfeng Wang, Kewei Xu, Zhaohui Zhang, Jianhui Liao, Changzhi GuVolume:
48
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.optlaseng.2009.12.006
File:
PDF, 1.87 MB
english, 2010