A Micro–Macroapproach to Predict Stiction due to Surface...

Journal of Microelectromechanical Systems 2011 / 08 Vol. 20; Iss. 4

A Micro–Macroapproach to Predict Stiction due to Surface Contact in Microelectromechanical Systems

Wu, Ling, Noels, Ludovic, Rochus, Véronique, Pustan, Marius, Golinval, Jean-Claude
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Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2011.2153823
Date:
August, 2011
File:
PDF, 416 KB
english, 2011
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