![](/img/cover-not-exists.png)
[IEEE 2012 Joint 21st IEEE ISAF / 11th IEEE ECAPD / IEEE PFM (ISAF/ECAPD/PFM) - Aveiro, Portugal (2012.07.9-2012.07.13)] Proceedings of ISAF-ECAPD-PFM 2012 - Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates
Kleiner, A., Suchaneck, G., Adolphi, B., Gerlach, G., Lavrentiev, V., Hubicka, Z., Cada, M., Jastrabik, L., Dejneka, A.Year:
2012
Language:
english
DOI:
10.1109/isaf.2012.6297777
File:
PDF, 188 KB
english, 2012