Basic sputtering process and ferroelectric properties of...

Integrated Ferroelectrics 1998 / 09 Vol. 21; Iss. 1-4

Basic sputtering process and ferroelectric properties of single–domain single–crystal thin films of PbTiO 3

Wasa, Kiyotaka, Haneda, Yoko, Sato, Toshifumi, Adachi, Hideaki, Kanno, Isaku, Schlom, Darrell G., Trolier-Mckinstry, S., Gan, Qing, Eom, Chang-Beom
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Volume:
21
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589808202085
Date:
September, 1998
File:
PDF, 684 KB
english, 1998
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