Optimisation of the RF power density to obtain good quality...

Optical Materials 2004 Vol. 25; Iss. 3

Optimisation of the RF power density to obtain good quality hydrogenated amorphous silicon films in a home-made glow discharge system

Akın Bacıoğlu, Alp Osman Kodolbaş, Özcan Öktü
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Volume:
25
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.optmat.2003.08.004
File:
PDF, 267 KB
english, 2004
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