New CMOS-compatible mechanical shear stress sensor

IEEE Sensors Journal 2001 / Dec. Vol. 1; Iss. 4

New CMOS-compatible mechanical shear stress sensor

Sutor, A., Lerch, R., Hohe, H.-P., Gavesi, M.
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Volume:
1
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/7361.983475
Date:
January, 2001
File:
PDF, 168 KB
english, 2001
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