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[IEEE 2010 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2010.12.6-2010.12.8)] 2010 International Electron Devices Meeting - Theory of workfunction control of silicides by doping for future Si-nano-devices based on fundamental physics of why silicides exist in nature
Nakayama, T., Kakushima, K., Nakatsuka, O., Machida, Y., Sotome, S., Matsuki, T., Ohmori, K., Iwai, H., Zaima, S., Chikyow, T., Shiraishi, K., Yamada, K.Year:
2010
Language:
english
DOI:
10.1109/iedm.2010.5703369
File:
PDF, 463 KB
english, 2010