[IEEE 2009 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Oxnard, CA, USA (2009.03.30-2009.04.2)] 2009 IEEE International Conference on Microelectronic Test Structures - Test Chip to Evaluate Measurement Methods for Small Capacitances
Kopanski, Joseph J., Afridi, M. Yaqub, Jiang, Chong, Richter, Curt A.Year:
2009
Language:
english
DOI:
10.1109/icmts.2009.4814606
File:
PDF, 4.73 MB
english, 2009