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[IEEE IEEE Micro Electro Mechanical Systems. 1995 - Amsterdam, Netherlands (29 Jan.-2 Feb. 1995)] Proceedings IEEE Micro Electro Mechanical Systems. 1995 - Electrostatic curved electrode actuators
Legtenberg, R., Berenschot, E., Elwenspoek, M., Fluitman, J.Year:
1995
Language:
english
DOI:
10.1109/memsys.1995.472557
File:
PDF, 574 KB
english, 1995