[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - Purging of foup for 450 mm wafer manufacturing
Chun-Yong Khoo,, Shih-Cheng Hu,, Che-Yu Huang,, Cheng-Wei Yang,, Chiu, Bill, Chou, Steven, Lu, Jerry, Huang, C. T.Year:
2013
Language:
english
DOI:
10.1109/asmc.2013.6552791
File:
PDF, 851 KB
english, 2013