[IEEE 1999 IEEE Hong Kong Electron Devices Meeting - Shatin, Hong Kong (26 June 1999)] Proceedings 1999 IEEE Hong Kong Electron Devices Meeting (Cat. No.99TH8458) - Fabrication process of wobble motors with polysilicon anchoring bearing
Chee Chenjie,, Liu Litian,, Tan Zhimin,, Xie Huikai,, Li Zhijian,Year:
1999
Language:
english
DOI:
10.1109/hkedm.1999.836416
File:
PDF, 277 KB
english, 1999