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[IEEE 2012 IEEE 13th International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM 2012) - Altai, Erlagol, Russia (2012.07.2-2012.07.6)] International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices - Direct nitridation of silicon surface by high-density inductively coupled plasma
Antonenko, A.Kh., Arzhannikova, S.A., Volodin, V.A., Efremov, M.D., Zazulya, P.S., Kamaev, G.N.Year:
2012
Language:
english
DOI:
10.1109/edm.2012.6310184
File:
PDF, 282 KB
english, 2012