[IEEE 2012 IEEE 13th International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM 2012) - Altai, Erlagol, Russia (2012.07.2-2012.07.6)] International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices - Direct nitridation of silicon surface by high-density inductively coupled plasma

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