[IEEE 2012 Conference on Optoelectronic and Microelectronic Materials & Devices (COMMAD) - Melbourne, Australia (2012.12.12-2012.12.14)] COMMAD 2012 - Effect of FIB milling on MEMS SOI cantilevers
Venkatesh, C., Singh, P. P., Renilkumar, M., Varma, M., Bhat, N., Pratap, R., Martyniuk, M., Keating, A., Umama-Membreno, G.A., Silva, K.K.M.B.D., Dell, J.M., Faraone, L.Year:
2012
Language:
english
DOI:
10.1109/commad.2012.6472412
File:
PDF, 509 KB
english, 2012