Low-energy ion irradiation during film growth for reducing defect densities in epitaxial TiN(100) films deposited by reactive-magnetron sputtering
Hultman, L., Helmersson, U., Barnett, S. A., Sundgren, J.-E., Greene, J. E.Volume:
61
Year:
1987
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.338257
File:
PDF, 684 KB
english, 1987