[IEEE 2001 International Symposium on VLSI Technology, Systems, and Applications. Proceedings of Technical Papers - Hsinchu, Taiwan (18-20 April 2001)] 2001 International Symposium on VLSI Technology, Systems, and Applications. Proceedings of Technical Papers (Cat. No.01TH8517) - High quality interpoly dielectrics deposited on the nitrided-polysilicon for nonvolatile memory devices
Tien Sheng Chao,, Wen Luh Yang,, Chun-Ming Cheng,, Tung Ming Pan,, Tan Fu Lei,Year:
2001
Language:
english
DOI:
10.1109/vtsa.2001.934503
File:
PDF, 431 KB
english, 2001