[IEEE The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. - Smolenice Castle, Slovakia (Oct. 17-21, 2004)] The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. - New results of low temperature PECVD amorphous silicon carbide
Huran, J., Hotovy, I., Kobzev, A.S., Balalykin, N.I.Year:
2004
Language:
english
DOI:
10.1109/asdam.2004.1441175
File:
PDF, 814 KB
english, 2004