[IEEE IEEE/SEMI Conference and Workshop on Advanced Semiconductor Manufacturing 2005. - Munich, Germany (11-12 April 2005)] IEEE/SEMI Conference and Workshop on Advanced Semiconductor Manufacturing 2005. - Thoughts on an automation concept for complex production processes within a learning organization
Gerhard Luhn, Hans-Joachim SchmidtYear:
2005
Language:
english
DOI:
10.1109/asmc.2005.1438792
File:
PDF, 1.29 MB
english, 2005