Accurate High Temperature Measurements Using Local...

IEEE Transactions on Device and Materials Reliability 2014 / 3 Vol. 14; Iss. 1

Accurate High Temperature Measurements Using Local Polysilicon Heater Structures

Pobegen, Gregor, Nelhiebel, Michael, de Filippis, Stefano, Grasser, Tibor
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Volume:
14
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/tdmr.2013.2265015
Date:
March, 2014
File:
PDF, 780 KB
english, 2014
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