[IEEE 2014 21st International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) - Kyoto, Japan (2014.7.2-2014.7.4)] 2014 21st International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) - Hydrogen behavior from ALD Al2O3 passivation layer for amorphous InGaZnO TFTs
Tanaka, Jun, Ueoka, Yoshihiro, Yoshitsugu, Koji, Fujii, Mami, Ishikawa, Yasuaki, Uraoka, Yukiharu, Takechi, Kazushige, Tanabe, HiroshiYear:
2014
Language:
english
DOI:
10.1109/am-fpd.2014.6867115
File:
PDF, 1.09 MB
english, 2014