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[IEEE Nanophotonics - Istanbul, Turkey (2011.08.8-2011.08.11)] 16th International Conference on Optical MEMS and Nanophotonics - MEMS rotary stage with linear stiffness
Baran, Utku, Davis, Wyatt O., Holmstrom, Sven, Brown, Dean, Sharma, Jaibir, Gokce, Sertan Kutal, Urey, HakanYear:
2011
Language:
english
DOI:
10.1109/omems.2011.6031053
File:
PDF, 134 KB
english, 2011