Interface Trap Density Metrology of State-of-the-Art...

IEEE Electron Device Letters 2011 / 04 Vol. 32; Iss. 4

Interface Trap Density Metrology of State-of-the-Art Undoped Si n-FinFETs

Tettamanzi, Giuseppe Carlo, Paul, Abhijeet, Lee, Sunhee, Mehrotra, Saumitra R., Collaert, Nadine, Biesemans, Serge, Klimeck, Gerhard, Rogge, Sven
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Volume:
32
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2011.2106150
Date:
April, 2011
File:
PDF, 286 KB
english, 2011
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