Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2005 Vol. 23; Iss. 6
![](/img/cover-not-exists.png)
Polymer time constants during low temperature nanoimprint lithography
Scheer, H.-C., Bogdanski, N., Wissen, M., Konishi, T., Hirai, Y.Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2121727
File:
PDF, 547 KB
english, 2005